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Understanding Selectivity Loss Mechanisms in Selective Material Deposition by Area Deactivation on 10 nm Cu/SiO2 Patterns
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Authors
Viva, Alessandro
;
Pasquali, Mattia
;
Carolan, Patrick
;
Sergeant, Stefanie
;
Meersschaut, Johan
;
Conard, Thierry
;
De Gendt, Stefan
;
Armini, Silvia
DOI
https://doi.org/10.1021/acsaelm.1c01348
ISSN
2637-6113
Issue
4
Journal
ACS Applied Electronic Materials
Volume
4
Title
Understanding Selectivity Loss Mechanisms in Selective Material Deposition by Area Deactivation on 10 nm Cu/SiO2 Patterns
Publication type
Journal article
Embargo date
9999-12-31
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2
20.500.12860/39760.2
*
2022-08-29T08:11:36Z
validation by library/open access desk
1
20.500.12860/39760
2022-05-06T08:19:21Z
*Selected version
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