Publication:
Understanding Selectivity Loss Mechanisms in Selective Material Deposition by Area Deactivation on 10 nm Cu/SiO2 Patterns
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Acq. date: 2026-02-25
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Acq. date: 2026-02-24
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1 since deposited on 2022-05-06
Acq. date: 2026-02-25
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1647 since deposited on 2022-05-06
1last month
Acq. date: 2026-02-24
Citations