Understanding Selectivity Loss Mechanisms in Selective Material Deposition by Area Deactivation on 10 nm Cu/SiO2 Patterns

Viva, Alessandro; Pasquali, Mattia; Carolan, Patrick; Sergeant, Stefanie; Meersschaut, Johan; Conard, Thierry; De Gendt, Stefan; Armini, Silvia

doi:https://doi.org/10.1021/acsaelm.1c01348

Publication:

Understanding Selectivity Loss Mechanisms in Selective Material Deposition by Area Deactivation on 10 nm Cu/SiO2 Patterns

Date

2022

Journal article

https://doi.org/10.1021/acsaelm.1c01348

Simple item page Full metadata Statistics

Files

Published version 9.29 MB

Author(s)

;

;

;

;

;

;

;

Journal

ACS Applied Electronic Materials

Statistics

1 since deposited on 2022-05-06

Acq. date: 2026-10-08

1657 since deposited on 2022-05-06

3last month

3last week

Acq. date: 2026-10-08

Understanding Selectivity Loss Mechanisms in Selective Material Deposition by Area Deactivation on 10 nm Cu/SiO2 Patterns

Date

Files

Author(s)

Journal

Abstract

Description

Statistics

Downloads

Views

Citations

Statistics

Downloads

Views

Citations