Browsing by author "Carolan, Patrick"
Now showing items 1-10 of 10
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A deep level transient spectroscopy study of hole traps in GexSe1-x-based layers for ovonic threshold switching selectors
Hsu, Brent; Simoen, Eddy; Lin, Dennis; Stesmans, Andre; Goux, Ludovic; Delhougne, Romain; Carolan, Patrick; Bender, Hugo; Kar, Gouri Sankar (2020) -
Area-Selective Deposition of AlOx and Al-Silicate for Fully Self- Aligned Via Integration
Pasquali, Mattia; Brady-Boyd, Anita; Lesniewska, Alicja; Carolan, Patrick; Conard, Thierry; O'Connor, Robert; De Gendt, Stefan; Armini, Silvia (2023) -
Electrical activity of extended defects in relaxed InxGa1-xAs hetero-epitaxial layers
Claeys, Cor; Hsu, Brent; Mols, Yves; Kunert, Bernardette; Bender, Hugo; Seidel, Felix; Carolan, Patrick; Langer, Robert; Merckling, Clement; Alian, AliReza; Waldron, Niamh; Eneman, Geert; Collaert, Nadine; Heyns, Marc; Simoen, Eddy (2020) -
Kinetics of chemical etching in nano-confined volumes
Vereecke, Guy; De Coster, Hanne; Carolan, Patrick; Bender, Hugo; Willems, Kherim; Ragnarsson, Lars-Ake; Van Dorpe, Pol; Horiguchi, Naoto; Holsteyns, Frank (2016) -
MoS2 synthesis by Gas Source MBE for transition metal dichalcogenides integration on large scale substrates
El Kazzi, Salim; Mortelmans, Wouter; Nuytten, Thomas; Meersschaut, Johan; Carolan, Patrick; Landeloos, Lien; Conard, Thierry; Radu, Iuliana; Heyns, Marc; Merckling, Clement (2018) -
Understanding Selectivity Loss Mechanisms in Selective Material Deposition by Area Deactivation on 10 nm Cu/SiO2 Patterns
Viva, Alessandro; Pasquali, Mattia; Carolan, Patrick; Sergeant, Stefanie; Meersschaut, Johan; Conard, Thierry; De Gendt, Stefan; Armini, Silvia (2022-03-29) -
Understanding the kinetics of Metal Induced Lateral Crystallization process to enhance the poly-Si channel quality and current conduction in 3-D NAND memory
Ramesh, Siva; Vadakupudhu Palayam, Senthil; Ajaykumar, Arjun; Opsomer, Karl; Bastos, Joao; Ragnarsson, Lars-Ake; Breuil, Laurent; Arreghini, Antonio; Wouters, Lennaert; Spampinato, Valentina; Favia, Paola; Nalin Mehta, Ankit; Carolan, Patrick; Nyns, Laura; Katcko, Kostantine; Stiers, Jimmy; Van den Bosch, Geert; Rosmeulen, Maarten (2021) -
Vertically stacked gate-all-around Si nanowire CMOS transistors with dual work function metal gates
Mertens, Hans; Ritzenthaler, Romain; Vaisman Chasin, Adrian; Schram, Tom; Kunnen, Eddy; Hikavyy, Andriy; Ragnarsson, Lars-Ake; Dekkers, Harold; Hopf, Toby; Wostyn, Kurt; Devriendt, Katia; Chew, Soon Aik; Kim, Min-Soo; Kikuchi, Yoshiaki; Rosseel, Erik; Mannaert, Geert; Kubicek, Stefan; Demuynck, Steven; Dangol, Anish; Bosman, Niels; Geypen, Jef; Carolan, Patrick; Bender, Hugo; Barla, Kathy; Horiguchi, Naoto; Mocuta, Dan (2016-12) -
Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistors
Vereecke, Guy; De Coster, Hanne; Carolan, Patrick; Bender, Hugo; Willems, Kherim; Ragnarsson, Lars-Ake; Van Dorpe, Pol; Horiguchi, Naoto; Holsteyns, Frank (2017) -
Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistors
Vereecke, Guy; De Coster, Hanne; Van Alphen, Senne; Carolan, Patrick; Bender, Hugo; Willems, Kherim; Ragnarsson, Lars-Ake; Van Dorpe, Pol; Horiguchi, Naoto; Holsteyns, Frank (2018)