Publication:
Vertically stacked gate-all-around Si nanowire CMOS transistors with dual work function metal gates
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2 since deposited on 2021-10-23
Acq. date: 2026-10-08
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2040 since deposited on 2021-10-23
Acq. date: 2026-10-08
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2 since deposited on 2021-10-23
Acq. date: 2026-10-08
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2040 since deposited on 2021-10-23
Acq. date: 2026-10-08
Citations