Browsing by author "Pasquali, Mattia"
Now showing items 1-14 of 14
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Area-Selective Atomic Layer Deposition of Ru Using Carbonyl-Based Precursor and Oxygen Co-Reactant: Understanding Defect Formation Mechanisms
Lodha, Jayant Kumar; Meersschaut, Johan; Pasquali, Mattia; Billington, Hans; De Gendt, Stefan; Armini, Silvia (2024) -
Area-selective deposition by a combination of organic film passivation and atomic layer deposition
Pasquali, Mattia; De Gendt, Stefan; Armini, Silvia (2019) -
Area-selective deposition by a combination of organic film passivation and atomic layer deposition
Pasquali, Mattia; De Gendt, Stefan; Armini, Silvia (2019) -
Area-Selective Deposition of AlOx and Al-Silicate for Fully Self- Aligned Via Integration
Pasquali, Mattia; Brady-Boyd, Anita; Lesniewska, Alicja; Carolan, Patrick; Conard, Thierry; O'Connor, Robert; De Gendt, Stefan; Armini, Silvia (2023) -
Area-selective deposition of low-k materials by means of the sol-gel method
Redzheb, Murad; Pasquali, Mattia; Armini, Silvia (2018) -
Dielectric on dielectric area-selective deposition by a combination of atomic layer deposition and organic film passivation for self-aligned via patterning
Pasquali, Mattia; De Gendt, Stefan; Armini, Silvia; Illiberi, Andrea; Verni, Giuseppe; Deng, Shaoren; Givens, Michael (2018) -
Downscaling area-selective deposition to sub-30 nm half-pitch lines
Pasquali, Mattia; Murdoch, Gayle; Tokei, Zsolt; De Gendt, Stefan; Armini, Silvia (2019) -
Nanomechanical Characterization of Organic Surface Passivation Films on 50 nm Patterns during Area-Selective Deposition
Pasquali, Mattia; Sergeant, Stefanie; Conard, Thierry; Spampinato, Valentina; Viva, Alessandro; De Gendt, Stefan; Armini, Silvia (2021-03-06) -
The role of atomic oxygen in the decomposition of self-assembled monolayers during area-selective atomic layer deposition
O'Connor, R.; Selvaraju, V.; Hughes, G.; Bogan, J.; Brady-Boyd, Anita; Armini, Silvia; Pasquali, Mattia (2022) -
Understanding Selectivity Loss Mechanisms in Selective Material Deposition by Area Deactivation on 10 nm Cu/SiO2 Patterns
Viva, Alessandro; Pasquali, Mattia; Carolan, Patrick; Sergeant, Stefanie; Meersschaut, Johan; Conard, Thierry; De Gendt, Stefan; Armini, Silvia (2022-03-29) -
Understanding the impact of Cu surface pre-treatment on Octadecanethiol-derived self-assembled monolayer as a mask for area-selective deposition
Pasquali, Mattia; De Gendt, Stefan; Armini, Silvia (2021) -
Vapor phase thiol self-assembled monolayers enabling area-selective deposition
Herregods, Sebastiaan; Delande, Tinne; Pasquali, Mattia; Tokei, Zsolt; Struyf, Herbert; Armini, Silvia (2019) -
Vapor phase thiol self-assembled monolayers for DoD ASD
Herregods, Sebastiaan; Delande, Tinne; Pasquali, Mattia; Tokei, Zsolt; Struyf, Herbert; Armini, Silvia (2019)