Surface engineering by plasma and organic films to enable area selective deposition in BEOLSurface engineering by plasma and organic films to enable area selective deposition in BEOL

Thumbnail
Metadata
Show full item record
Authors
Armini, Silvia; Pasquali, Mattia
Conference
MRS Spring 2019
Title
Surface engineering by plasma and organic films to enable area selective deposition in BEOLSurface engineering by plasma and organic films to enable area selective deposition in BEOL
Publication type
Meeting abstract
Collections