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Surface engineering by plasma and organic films to enable area selective deposition in BEOLSurface engineering by plasma and organic films to enable area selective deposition in BEOL
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1947 since deposited on 2021-10-27
Acq. date: 2025-12-16
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1947 since deposited on 2021-10-27
Acq. date: 2025-12-16
Citations