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Surface engineering by plasma and organic films to enable area selective deposition in BEOLSurface engineering by plasma and organic films to enable area selective deposition in BEOL
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1950 since deposited on 2021-10-27
1last month
Acq. date: 2026-06-05
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Statistics
Views
1950 since deposited on 2021-10-27
1last month
Acq. date: 2026-06-05
Citations