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Surface engineering by plasma and organic films to enable area selective deposition in BEOLSurface engineering by plasma and organic films to enable area selective deposition in BEOL

Date

2019
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dc.contributor.authorArmini, Silvia
dc.contributor.authorPasquali, Mattia
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorPasquali, Mattia
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecPasquali, Mattia::0000-0002-1309-1082
dc.date.accessioned2021-10-27T07:27:11Z
dc.date.available2021-10-27T07:27:11Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32455
dc.source.conferenceMRS Spring 2019
dc.source.conferencedate22/04/2019
dc.source.conferencelocationPhoenix, AZ USA
dc.title

Surface engineering by plasma and organic films to enable area selective deposition in BEOLSurface engineering by plasma and organic films to enable area selective deposition in BEOL

dc.typeMeeting abstract
dspace.entity.typePublication
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