Authors

Herregods, Sebastiaan; Delande, Tinne; Pasquali, Mattia; Tokei, Zsolt; Struyf, Herbert; Armini, Silvia

Conference

IEEE International Interconnect Technology Conference (IITC 2019) and Materials for Advanced Metallization Conference (MAM 2019)

Title

Vapor phase thiol self-assembled monolayers enabling area-selective deposition

Publication type

Meeting abstract