Browsing by author "Delorme, Maxence"
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Compact 2D OPC modeling of a metal oxide EUV resist for a 7nm node BEOL layer
De Simone, Danilo; Lyons, Adam; Rio, David; Lee, Sook; Delorme, Maxence; Fumar-Pici, Anita; Kocsis, Michael; De Schepper, Peter; Greer, Michael; Wallow, THomas; Stowers, Jason K; Gillijns, Werner; Bekaert, Joost (2017) -
Improving Silicon-photonics inverse-design printability by leveraging SEM contours for advanced Optical Proximity Correction techniques
Drissi, Youssef; Gillijns, Werner; Lardenois, Sebastien; Verheyen, Peter; Lepage, Guy; Mohsen, Mahmoud; Delorme, Maxence (2022)