EISBN
978-1-5106-4896-8
ISBN
978-1-5106-4895-1
ISSN
0277-786X
Conference
Conference on Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XV Part of SPIE Photonics West OPTO Conference
Journal
Proceedings of SPIE
Volume
12012
Title
Improving Silicon-photonics inverse-design printability by leveraging SEM contours for advanced Optical Proximity Correction techniques
Publication type
Proceedings paper