Browsing by author "Mohsen, Mahmoud"
Now showing items 1-2 of 2
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28nm-pitch Ru interconnects patterned with 0.33NA-EUV single exposure
Das, Sayantan; Kisson, Nicola; Mahmud Ul Hasan, Hasan MD; Rynders, Luc; Kljucar, Luka; Halder, Sandip; Leray, Philippe; Dusa, Mircea; Rio, David; Mohsen, Mahmoud; Spence, Chris; De Poortere, Etienne (2021) -
Improving Silicon-photonics inverse-design printability by leveraging SEM contours for advanced Optical Proximity Correction techniques
Drissi, Youssef; Gillijns, Werner; Lardenois, Sebastien; Verheyen, Peter; Lepage, Guy; Mohsen, Mahmoud; Delorme, Maxence (2022)