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28nm-pitch Ru interconnects patterned with 0.33NA-EUV single exposure
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Authors
Das, Sayantan
;
Kisson, Nicola
;
Mahmud Ul Hasan, Hasan MD
;
Rynders, Luc
;
Kljucar, Luka
;
Halder, Sandip
;
Leray, Philippe
;
Dusa, Mircea
;
Rio, David
;
Mohsen, Mahmoud
;
Spence, Chris
;
De Poortere, Etienne
DOI
10.1117/12.2600937
EISBN
978-1-5106-4553-0
ISBN
978-1-5106-4552-3
ISSN
0277-786X
Conference
International Conference on Extreme Ultraviolet Lithography
Journal
Proceedings of SPIE
Volume
11854
Title
28nm-pitch Ru interconnects patterned with 0.33NA-EUV single exposure
Publication type
Proceedings paper
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Conference contributions
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Date
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5
20.500.12860/39874.5
*
2022-08-31T08:20:18Z
validation by library/open access desk
4
20.500.12860/39874.4
2022-08-05T15:10:13Z
validation by imec author
3
20.500.12860/39874.3
2022-07-08T08:40:50Z
validation by library/open access desk
2
20.500.12860/39874.2
2022-06-14T09:01:31Z
validation by imec author
1
20.500.12860/39874
2022-05-22T02:19:15Z
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