Browsing by author "Spence, Chris"
Now showing items 1-3 of 3
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28nm-pitch Ru interconnects patterned with 0.33NA-EUV single exposure
Das, Sayantan; Kisson, Nicola; Mahmud Ul Hasan, Hasan MD; Rynders, Luc; Kljucar, Luka; Halder, Sandip; Leray, Philippe; Dusa, Mircea; Rio, David; Mohsen, Mahmoud; Spence, Chris; De Poortere, Etienne (2021) -
A new paradigm for in-line detection and control of patterning defects
Hunsche, Stefan; Jochemsen, Marinus; Jain, Vivek; Zhou, Xinjian; Chen, Frank; Vellanki, Venu; Spence, Chris; Halder, Sandip; Van Den Heuvel, Dieter; Truffert, Vincent (2015) -
Mask Contribution to OPC Model Accuracy
Lyons, Adam; Wallow, Tom; Hennerkes, Christoph; Spence, Chris; Delorme, Max; Rio, David; Tsunoda, Dai; Torigoe, Yohei; Hamaji, Masakazu (2020)