Publication:

A new paradigm for in-line detection and control of patterning defects

Date

2015

Proceedings Paper

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Author(s)

Hunsche, Stefan

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Jochemsen, Marinus

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Van Den Heuvel, Dieter

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Truffert, Vincent

Statistics

1955 since deposited on 2021-10-22

Acq. date: 2026-07-17