Publication:

Compact 2D OPC modeling of a metal oxide EUV resist for a 7nm node BEOL layer

Date

2017
Proceedings Paper
https://doi.org/10.1117/12.2260441
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37771.pdf 5.44 MB

Author(s)

De Simone, Danilo  
;
Lyons, Adam
;
Rio, David  
;
Lee, Sook
;
Delorme, Maxence
;
Fumar-Pici, Anita
;
Kocsis, Michael  
;
De Schepper, Peter  
;
Greer, Michael  
;
Wallow, THomas
;
Stowers, Jason K
;
Gillijns, Werner  
;
Bekaert, Joost  

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