Publication:

Compact 2D OPC modeling of a metal oxide EUV resist for a 7nm node BEOL layer

Date

2017

Proceedings Paper

https://doi.org/10.1117/12.2260441

Simple item page Full metadata Statistics

Files

37771.pdf 5.44 MB

Author(s)

De Simone, Danilo

;

;

;

;

Delorme, Maxence

;

Fumar-Pici, Anita

;

Kocsis, Michael

;

De Schepper, Peter

;

;

;

Stowers, Jason K

;

Gillijns, Werner

;

Statistics

2001 since deposited on 2021-10-24

2last month

Acq. date: 2026-04-05