Publication:

Compact 2D OPC modeling of a metal oxide EUV resist for a 7nm node BEOL layer

Date

2017

Proceedings Paper

https://doi.org/10.1117/12.2260441

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Files

37771.pdf 5.44 MB

Author(s)

De Simone, Danilo

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Delorme, Maxence

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Fumar-Pici, Anita

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Kocsis, Michael

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De Schepper, Peter

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Stowers, Jason K

;

Gillijns, Werner

;

Statistics

2001 since deposited on 2021-10-24

Acq. date: 2026-05-17