Browsing by author "Takabayashi, Alain Yuji"
Now showing items 21-23 of 23
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Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phase
Edinger, Pierre; Jo, Gaehun; Nguyen, Chris Phong Van; Takabayashi, Alain Yuji; Errando-Herranz, Carlos; Antony, Cleitus; Talli, Giuseppe; Verheyen, Peter; Khan, Muhammad Umar; Bleiker, Simon J.; Bogaerts, Wim; Quack, Niels; Niklaus, Frank; Gylfason, Kristinn B. (2023) -
Wafer-level hermetically sealed silicon photonic MEMS
Jo, Gaehun; Edinger, Pierre; Bleiker, Simon J.; Wang, Xiaojing; Takabayashi, Alain Yuji; Sattari, Hamed; Quack, Niels; Jezzini, Moises; Lee, Jun Su; Verheyen, Peter; Zand, Iman; Khan, Muhammad Umar; Bogaerts, Wim; Stemme, Goran; Gylfason, Kristinn B.; Niklaus, Frank (2022) -
Wafer-Level Vacuum Sealing for Packaging of Silicon Photonic MEMS
Joa, Gaehun; Edinger, Pierre; Bleiker, Simon J.; Wang, Xiaojing; Takabayashi, Alain Yuji; Sattari, Hamed; Quack, Niels; Jezzini, Moises; Verheyen, Peter; Stemme, Goran; Bogaerts, Wim; Gylfason, Kristinn B.; Niklaus, Frank (2021)