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Wafer-level hermetically sealed silicon photonic MEMS
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Authors
Jo, Gaehun
;
Edinger, Pierre
;
Bleiker, Simon J.
;
Wang, Xiaojing
;
Takabayashi, Alain Yuji
;
Sattari, Hamed
;
Quack, Niels
;
Jezzini, Moises
;
Lee, Jun Su
;
Verheyen, Peter
;
Zand, Iman
;
Khan, Muhammad Umar
;
Bogaerts, Wim
;
Stemme, Goran
;
Gylfason, Kristinn B.
;
Niklaus, Frank
DOI
10.1364/PRJ.441215
ISSN
2327-9125
Issue
2
Journal
PHOTONICS RESEARCH
Volume
10
Title
Wafer-level hermetically sealed silicon photonic MEMS
Publication type
Journal article
Embargo date
2022-02-28
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Summary
2
20.500.12860/41890.2
*
2023-06-29T15:03:48Z
validation by library/open access desk
1
20.500.12860/41890
2023-06-20T10:35:26Z
*Selected version
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