Publication:

Wafer-level hermetically sealed silicon photonic MEMS

Date

2022
Journal article
https://doi.org/10.1364/prj.441215
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Author(s)

Jo, Gaehun
;
Edinger, Pierre
;
Bleiker, Simon J.
;
Wang, Xiaojing
;
Takabayashi, Alain Yuji
;
Sattari, Hamed
;
Quack, Niels
;
Jezzini, Moises
;
Lee, Jun Su
;
Verheyen, Peter
;
Zand, Iman  
;
Khan, Muhammad Umar  
;
Bogaerts, Wim  
;
Stemme, Goran
;
Gylfason, Kristinn B.
;
Niklaus, Frank

Journal

PHOTONICS RESEARCH

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578 since deposited on 2023-06-20
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1215 since deposited on 2023-06-20
Acq. date: 2026-09-21

Citations