Wafer-level hermetically sealed silicon photonic MEMS

Jo, Gaehun; Edinger, Pierre; Bleiker, Simon J.; Wang, Xiaojing; Takabayashi, Alain Yuji; Sattari, Hamed; Quack, Niels; Jezzini, Moises; Lee, Jun Su; Verheyen, Peter; Zand, Iman; Khan, Muhammad Umar; Bogaerts, Wim; Stemme, Goran; Gylfason, Kristinn B.; Niklaus, Frank

doi:10.1364/PRJ.441215

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Wafer-level hermetically sealed silicon photonic MEMS

Date

2022

Journal article

https://doi.org/10.1364/PRJ.441215

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Takabayashi, Alain Yuji

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Gylfason, Kristinn B.

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Niklaus, Frank

Journal

PHOTONICS RESEARCH

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Wafer-level hermetically sealed silicon photonic MEMS

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