Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Wafer-level hermetically sealed silicon photonic MEMS
Publication:
Wafer-level hermetically sealed silicon photonic MEMS
Copy permalink
Date
2022
Journal article
https://doi.org/10.1364/PRJ.441215
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
Published version
1.58 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Jo, Gaehun
;
Edinger, Pierre
;
Bleiker, Simon J.
;
Wang, Xiaojing
;
Takabayashi, Alain Yuji
;
Sattari, Hamed
;
Quack, Niels
;
Jezzini, Moises
;
Lee, Jun Su
;
Verheyen, Peter
;
Zand, Iman
;
Khan, Muhammad Umar
;
Bogaerts, Wim
;
Stemme, Goran
;
Gylfason, Kristinn B.
;
Niklaus, Frank
Journal
PHOTONICS RESEARCH
Abstract
Description
Metrics
Downloads
182
since deposited on 2023-06-20
32
last month
5
last week
Acq. date: 2025-12-10
Views
1206
since deposited on 2023-06-20
Acq. date: 2025-12-10
Citations
Metrics
Downloads
182
since deposited on 2023-06-20
32
last month
5
last week
Acq. date: 2025-12-10
Views
1206
since deposited on 2023-06-20
Acq. date: 2025-12-10
Citations