Publication:

Wafer-level hermetically sealed silicon photonic MEMS

Date

2022
Journal article
https://doi.org/10.1364/PRJ.441215
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dc.contributor.authorJo, Gaehun
dc.contributor.authorEdinger, Pierre
dc.contributor.authorBleiker, Simon J.
dc.contributor.authorWang, Xiaojing
dc.contributor.authorTakabayashi, Alain Yuji
dc.contributor.authorSattari, Hamed
dc.contributor.authorQuack, Niels
dc.contributor.authorJezzini, Moises
dc.contributor.authorLee, Jun Su
dc.contributor.authorVerheyen, Peter
dc.contributor.authorZand, Iman
dc.contributor.authorKhan, Muhammad Umar
dc.contributor.authorBogaerts, Wim
dc.contributor.authorStemme, Goran
dc.contributor.authorGylfason, Kristinn B.
dc.contributor.authorNiklaus, Frank
dc.contributor.imecauthorZand, Iman
dc.contributor.imecauthorKhan, Muhammad Umar
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.orcidextJo, Gaehun::0000-0002-2752-7422
dc.contributor.orcidextEdinger, Pierre::0000-0002-7339-6662
dc.contributor.orcidextBleiker, Simon J.::0000-0002-4867-0391
dc.contributor.orcidextWang, Xiaojing::0000-0002-1774-6189
dc.contributor.orcidextTakabayashi, Alain Yuji::0000-0002-1654-6636
dc.contributor.orcidextSattari, Hamed::0000-0002-4792-429X
dc.contributor.orcidextQuack, Niels::0000-0001-5189-0929
dc.contributor.orcidextVerheyen, Peter::0000-0002-8245-9442
dc.contributor.orcidextStemme, Goran::0000-0001-9552-4234
dc.contributor.orcidimecZand, Iman::0000-0001-9857-7331
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecKhan, Muhammad Umar::0000-0001-5760-7485
dc.date.accessioned2023-06-29T15:10:43Z
dc.date.available2023-06-20T10:35:26Z
dc.date.available2023-06-29T15:10:43Z
dc.date.embargo2022-02-28
dc.date.issued2022
dc.description.wosFundingTextH2020 Industrial Leadership (101017186 (AEOLUS), 780283 (MORPHIC), 825272 (ULISSES), 871740 (ZeroAMP)).
dc.identifier.doi10.1364/PRJ.441215
dc.identifier.issn2327-9125
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41890
dc.publisherCHINESE LASER PRESS
dc.source.beginpageA14
dc.source.endpageA21
dc.source.issue2
dc.source.journalPHOTONICS RESEARCH
dc.source.numberofpages8
dc.source.volume10
dc.subject.keywordsCAVITIES
dc.title

Wafer-level hermetically sealed silicon photonic MEMS

dc.typeJournal article
dspace.entity.typePublication
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