Browsing by author "Stemme, Goran"

Now showing items 1-2 of 2

    • Wafer-level hermetically sealed silicon photonic MEMS 

      Jo, Gaehun; Edinger, Pierre; Bleiker, Simon J.; Wang, Xiaojing; Takabayashi, Alain Yuji; Sattari, Hamed; Quack, Niels; Jezzini, Moises; Lee, Jun Su; Verheyen, Peter; Zand, Iman; Khan, Muhammad Umar; Bogaerts, Wim; Stemme, Goran; Gylfason, Kristinn B.; Niklaus, Frank (2022)

    • Wafer-Level Vacuum Sealing for Packaging of Silicon Photonic MEMS 

      Joa, Gaehun; Edinger, Pierre; Bleiker, Simon J.; Wang, Xiaojing; Takabayashi, Alain Yuji; Sattari, Hamed; Quack, Niels; Jezzini, Moises; Verheyen, Peter; Stemme, Goran; Bogaerts, Wim; Gylfason, Kristinn B.; Niklaus, Frank (2021)