Browsing by author "Zyryanov, Sergey M."

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Effect of porosity and pore size on dielectric constant of organosilicate based low-k films : an analytical approach

Palov, A; Voronina, E; Rakhimova, T; Lopaev, D; Zyryanov, Sergey M.; Mankelevich, Yu; Krishtab, Mikhail; Baklanov, Mikhaïl (2016)