Browsing by author "Papvieros, George"
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Challenges in line edge roughness metrology in directed self-assembly lithography: placement errors and cross-line correlations
Constantoudis, Vassilios; Papvieros, George; Gogolides, Evangelos; Vaglio Pret, Alessandro; Pathangi Sriraman, Hari; Gronheid, Roel (2017)