Authors

Constantoudis, Vassilios; Papvieros, George; Gogolides, Evangelos; Vaglio Pret, Alessandro; Pathangi Sriraman, Hari; Gronheid, Roel

ISSN

1932-5150

Issue

2

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Volume

16

Title

Challenges in line edge roughness metrology in directed self-assembly lithography: placement errors and cross-line correlations

Publication type

Journal article

Embargo date

9999-12-31