Browsing by author "Kaushik, V."

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Approach for a standardized methodology for multisite processing of 300-mm wafers at R&D sites

Oechsner, Richard; Pfeffer, M.; Frickinger, J.; Schellenberger, M.; Roeder, G.; Pfitzner, L.; Ryssel, H.; Fritzsche, M.; Kaushik, V.; Renaud, D.; Danel, A.; Claeys, Cor; Bearda, Twan; Lering, M.; Graef, M.; Murphy, B.; Walther, H.; Hury, S. (2007)
Compatibility of polysilicon with HfO2-based gate dielectrics for CMOS applications

Kaushik, V.; De Gendt, Stefan; Caymax, Matty; Young, E.; Röhr, Erika; Van Elshocht, Sven; Delabie, Annelies; Claes, Martine; Shi, Xiaoping; Chen, Jerry; Carter, Richard; Conard, Thierry; Vandervorst, Wilfried; Schaekers, Marc; Heyns, Marc (2003)