Browsing by author "Loh, James"
Now showing items 1-2 of 2
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Evaluation and screening of different wet cleaning solutions on BEOL applications
Suhard, Samuel; Claes, Martine; Loh, James; Vereecke, Guy; Demuynck, Steven; Vereecke, Bart; Beyer, Gerald (2009) -
Screening and evaluation of different wet cleaning solution for post etch residue removal in BEOL applications
Suhard, Samuel; Claes, Martine; Loh, James; Vereecke, Guy; Pantouvaki, Marianna; Demuynck, Steven; Vereecke, Bart; Beyer, Gerald (2009)