Browsing by author "Bruggeman, Albert"

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Optical proximity effects and correction strategies for chemical amplified DUV resists

Op de Beeck, Maaike; Bruggeman, Albert; Botermans, Harry; Van Driessche, Veerle; Yen, Anthony; Tritchkov, Alexander; Jonckheere, Rik; Ronse, Kurt; Van den hove, Luc (1996)