Publication:

Optical proximity effects and correction strategies for chemical amplified DUV resists

Date

1996

Proceedings Paper

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Files

1373.pdf 762.18 KB

Author(s)

Op de Beeck, Maaike

;

Bruggeman, Albert

;

Botermans, Harry

;

Van Driessche, Veerle

;

;

Tritchkov, Alexander

;

Jonckheere, Rik

;

;

Van den hove, Luc

Metrics

1957 since deposited on 2021-09-29

4last month

Acq. date: 2025-12-12