Browsing by author "Tuominen, N."

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    • Properties of HfTaxOy high-k layers deposited by ALCVD 

      Zhao, Chao; Rittersma, Z.M.; van Berkum, J.G.M.; Snijders, J.H.M.; Hendriks, A.; Breimer, P.; Graat, P.; Maes, Jan; Witters, H.; Afanasiev, Valeri; Tois, E.; Tuominen, N.; Caymax, Matty; De Gendt, Stefan; Heyns, Marc (2005)