Browsing by author "Lukaszewicz, Mikolasj"
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Vacuum ultra-violet damage and damage mitigation for plasma processing of highly porous organosilicate glass dielectrics
de Marneffe, Jean-Francois; Zhang, Liping; Heyne, Markus; Lukaszewicz, Mikolasj; Porter, Stephen Barry; Vajda, Felim; Rutigliani, Vito; Krishtab, Mikhail; Goodyear, Andy; Cooke, Mike; Verdonck, Patrick; Baklanov, Mikhaïl (2015)