Browsing by author "Mountsier, Tom"

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Layout optimization and trade-off between 193i and EUV-based patterning for SRAM cells to improve performance and process variability at 7nm technology node

Sakhare, Sushil; Trivkovic, Darko; Mountsier, Tom; Kim, Min-Soo; Mocuta, Dan; Ryckaert, Julien; Mercha, Abdelkarim; Verkest, Diederik; Thean, Aaron; Dusa, Mircea (2015)