Browsing by author "Atanasova, Tanya"
Now showing items 1-12 of 12
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Adsorption/desorption of suppressor complex on copper: description of the critical potential
Atanasova, Tanya; Strubbe, Katrien; Vereecken, Philippe (2010) -
Adsorption/desorption of suppressor complex on copper: description of the critical potential
Atanasova, Tanya; Strubbe, Katrien; Vereecken, Philippe (2011-01) -
Characterization of threading dislocations in thin germanium layers by defect etching: towards chromium and HF free solution
Souriau, Laurent; Atanasova, Tanya; Terzieva, Valentina; Moussa, Alain; Caymax, Matty; Loo, Roger; Meuris, Marc; Vandervorst, Wilfried (2008) -
Effect of ionic strength and the electrolyte composition on the suppression of copper deposition by PEG
Atanasova, Tanya; Strubbe, Katrien; Vereecken, Philippe (2010) -
Electrochemical determination of the cupric ion activity in aqueous acidic cupric sulfate electrolytes
Atanasova, Tanya; Strubbe, Katrien; Vereecken, Philippe (2013) -
Physicochemical mechanism of damascene copper plating: effect of suppressor
Atanasova, Tanya; Strubbe, Katrien; Vereecken, Philippe (2009) -
Seed-less copper electrochemical deposition on PVD resistive substrates as a replacement/enhancement for PVD Cu seed layers in HAR TSVs
Armini, Silvia; Wilson, Chris; Moussa, Alain; Franquet, Alexis; Vanstreels, Kris; Atanasova, Tanya; Radisic, Alex; Civale, Yann; Redolfi, Augusto; Van Ammel, Annemie; El-Mekki, Zaid; Bryce, George; Ruythooren, Wouter (2010) -
Ultra-low copper baths for sub-30nm copper interconnects
Atanasova, Tanya; Caluwaerts, Rudy; Carbonell, Laure; Strubbe, Katrien; Vereecken, Philippe (2011) -
Ultra-low copper baths for sub-35 nm copper interconnects
Atanasova, Tanya; Carbonell, Laure; Caluwaerts, Rudy; Tokei, Zsolt; Strubbe, Katrien; Vereecken, Philippe (2013) -
Ultra-low copper baths for sub-35nm copper interconnects
Atanasova, Tanya (2011) -
Ultra-low copper baths for sub-35nm copper interconnects
Atanasova, Tanya; Carbonell, Laure; Caluwaerts, Rudy; Tokei, Zsolt; Strubbe, Katrien; Vereecken, Philippe (2012) -
Wafer-scale Cu plating uniformity on thin Cu seed layers
Yang, Liu; Atanasova, Tanya; Radisic, Alex; Deconinck, Johan; West, Alan; Vereecken, Philippe (2013)