Authors

Armini, Silvia; Wilson, Chris; Moussa, Alain; Franquet, Alexis; Vanstreels, Kris; Atanasova, Tanya; Radisic, Alex; Civale, Yann; Redolfi, Augusto; Van Ammel, Annemie; El-Mekki, Zaid; Bryce, George; Ruythooren, Wouter

Conference

Electrochemical Engineering for the 21st Century (dedicated to Richard C. Alkire)

Title

Seed-less copper electrochemical deposition on PVD resistive substrates as a replacement/enhancement for PVD Cu seed layers in HAR TSVs

Publication type

Proceedings paper

Embargo date

9999-12-31