Browsing by author "Mulders, T."
Now showing items 1-1 of 1
-
Accurate EUV lithography simulation enabled by calibrated physical resist models
Klostermann, U.K.; Mulders, T.; Schmoeller, T.; Demmerle, W.; Lorusso, Gian; Hendrickx, Eric (2010-09)
Now showing items 1-1 of 1