Browsing by author "Holz, M"

Now showing items 1-1 of 1

High-throughput process chain for single electron transistor devices based on field-emission scanning probe lithography and Smart Nanoimprint technology

Lenk, Claudia; Krivoshapkina, Yana; Hofmann, Martin; Lenk, Steve; Tzvetan, Ivanov; Rangelow, Ivo; Ahmad, Ahmad; Reum, Alexander; Holz, M; Glinsner, Thomas; Eibelhuber, Martin; Treiblmayr, Dominik; Schamberger, Barbara; Chan, BT; El Otell, Ziad; de Marneffe, Jean-Francois (2019)