Authors

Lenk, Claudia; Krivoshapkina, Yana; Hofmann, Martin; Lenk, Steve; Tzvetan, Ivanov; Rangelow, Ivo; Ahmad, Ahmad; Reum, Alexander; Holz, M; Glinsner, Thomas; Eibelhuber, Martin; Treiblmayr, Dominik; Schamberger, Barbara; Chan, BT; El Otell, Ziad; de Marneffe, Jean-Francois

ISSN

1071-1023

Issue

2

Journal

Journal of Vacuum Science and Technology B

Volume

37

Title

High-throughput process chain for single electron transistor devices based on field-emission scanning probe lithography and Smart Nanoimprint technology

Publication type

Journal article