Browsing by author "El Otell, Ziad"

Advanced etching for nanodevices and 2D materials

de Marneffe, Jean-Francois; Cooke, Mike; Goodyear, Andy; Braithwaite, Nicolas; Sutton, Yvonne; Bowden, Mark; Altamirano Sanchez, Efrain; Zotovich, Alexey; El Otell, Ziad; Chan, BT; Knoll, Armin; Rawlings, Colin; Duerig, Urs; Spiesser, Martin; Kaestner, Marcus; Neuber, Christian; Rangelow, Ivo (2016)

Ar and H2 plasma and neutral/ion beam treatment of EUV resist

De Schepper, Peter; Marinov, Daniil; El Otell, Ziad; Altamirano Sanchez, Efrain; de Marneffe, Jean-Francois; De Gendt, Stefan; Braithwaite, Nicholas St. J. (2015-03)

Challenges for line width / line edge roughness (LWR/lER) improvement in Directed Self-Assembly (DSA) advanced patterning

Chan, BT; Pathangi Sriraman, Hari; Singh, Arjun; El Otell, Ziad; Gronheid, Roel; de Marneffe, Jean-Francois; Piumi, Daniele (2015)

Comparison between vacuum ultra-violet emission of CF4/Ar and CF3I/Ar plasmas in CCP chamber for low-k etching

Zotovich, A.; El Otell, Ziad; de Marneffe, Jean-Francois; Proshina, O.; Lopaev, D.; Rakhimova, T.; Baklanov, Mikhaïl (2015)

Comparison between Vacuum Ultra-Violet emission of CF4/Ar and CF3I/Ar plasmas in CCP chamber for low-k etching

Zotovich, Alexey; El Otell, Ziad; de Marneffe, Jean-Francois; Proshina, Olga; Lopaev, Dimitri; Rakhimova, Tatyana; Baklanov, Mikhaïl (2016)

Development and characterization of a fast neutral beam source for damage-free etching

Marinov, Daniil; El Otell, Ziad; Bowden, Mark; Braithwaite, Nicholas (2014)

Development of a novel wafer probe for in-situ measurements

El Otell, Ziad; Marinov, Daniil; Bowden, Mark; Samara, Vladimir; de Marneffe, Jean-Francois; Verdonck, Patrick; Braithwaite, Nicholas (2013)

Development of a novel wafer probe for in-situ measurements

El Otell, Ziad; Marinov, Daniil; Samra, Vladimir; Bowden, Mark; de Marneffe, Jean-Francois; Verdonck, Patrick; Braithwaite, Nicholas (2014)

Development of a novel wafer-probe for in situ measurements of thin film properties

El Otell, Ziad; Marinov, Daniil; Samara, Vladimir; Bowden, Mark; de Marneffe, Jean-Francois; Verdonck, Patrick; Braithwaite, Nicholas St. J. (2015)

Enhancing etch contrast in DSA block copolymer films with sequential infiltration synthesis on 300mm Si substrates

Singh, Arjun; Sayan, Safak; El Otell, Ziad; Chan, BT; Gronheid, Roel (2014)

Extraction and neutralization of positive and negative ions from a pulsed electronegative inductively coupled plasma

Marinov, Daniil; El Otell, Ziad; Bowden, Mark; Braithwaite, Nicholas (2015)

High-throughput process chain for single electron transistor devices based on field-emission scanning probe lithography and Smart Nanoimprint technology

Lenk, Claudia; Krivoshapkina, Yana; Hofmann, Martin; Lenk, Steve; Tzvetan, Ivanov; Rangelow, Ivo; Ahmad, Ahmad; Reum, Alexander; Holz, M; Glinsner, Thomas; Eibelhuber, Martin; Treiblmayr, Dominik; Schamberger, Barbara; Chan, BT; El Otell, Ziad; de Marneffe, Jean-Francois (2019)