Development of a novel wafer-probe for in situ measurements of thin film properties

Publication:

2015

Journal article

Author(s)

;

Marinov, Daniil

;

Samara, Vladimir

;

Bowden, Mark

;

;

;

Braithwaite, Nicholas St. J.

Plasma Sources Science and Technology

1916 since deposited on 2021-10-22

Acq. date: 2026-04-26