Development of a novel wafer-probe for in situ measurements of thin film properties

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Author(s)

;

Marinov, Daniil

;

Samara, Vladimir

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;

de Marneffe, Jean-Francois

;

Verdonck, Patrick

;

Braithwaite, Nicholas St. J.

Journal

Plasma Sources Science and Technology

Metrics

1907 since deposited on 2021-10-22

Acq. date: 2025-10-23