Publication:

Hydrogen plasma treatment: the evolution of roughness in frequency domain

Date

2014

Proceedings Paper

Simple item page Full metadata Statistics

Files

27790.pdf 1.44 MB

Author(s)

De Schepper, Peter

;

Vaglio Pret, Alessandro

;

Altamirano Sanchez, Efrain

;

;

De Gendt, Stefan

Statistics

1960 since deposited on 2021-10-22

Acq. date: 2026-10-12