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Hydrogen plasma treatment: the evolution of roughness in frequency domain
Publication:
Hydrogen plasma treatment: the evolution of roughness in frequency domain
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Date
2014
Proceedings Paper
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27790.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Schepper, Peter
;
Vaglio Pret, Alessandro
;
Altamirano Sanchez, Efrain
;
El Otell, Ziad
;
De Gendt, Stefan
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1958
since deposited on 2021-10-22
Acq. date: 2026-01-09
Citations
Metrics
Views
1958
since deposited on 2021-10-22
Acq. date: 2026-01-09
Citations