Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Hydrogen plasma treatment: the evolution of roughness in frequency domain
Publication:
Hydrogen plasma treatment: the evolution of roughness in frequency domain
Date
2014
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
27790.pdf
1.44 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Schepper, Peter
;
Vaglio Pret, Alessandro
;
Altamirano Sanchez, Efrain
;
El Otell, Ziad
;
De Gendt, Stefan
Journal
Abstract
Description
Metrics
Views
1957
since deposited on 2021-10-22
2
last week
Acq. date: 2025-10-29
Citations
Metrics
Views
1957
since deposited on 2021-10-22
2
last week
Acq. date: 2025-10-29
Citations