Line edge and width roughness smoothing by plasma treatment

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Authors

De Schepper, Peter; Hansen, Terje; Altamirano Sanchez, Efrain; Vaglio Pret, Alessandro; El Otell, Ziad; Boullart, Werner; De Gendt, Stefan

ISSN

1537-1646

Issue

2

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Volume

13

Title

Line edge and width roughness smoothing by plasma treatment

Publication type

Journal article

Embargo date

9999-12-31

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