Publication:

Line edge and width roughness smoothing by plasma treatment

Date

2014
Journal article
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

30441.pdf 681.52 KB

Author(s)

De Schepper, Peter  
;
Hansen, Terje
;
Altamirano Sanchez, Efrain  
;
Vaglio Pret, Alessandro  
;
El Otell, Ziad  
;
Boullart, Werner  
;
De Gendt, Stefan  

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Abstract

Description

Metrics

Views

1936 since deposited on 2021-10-22
Acq. date: 2025-10-29

Citations

Metrics

Views

1936 since deposited on 2021-10-22
Acq. date: 2025-10-29

Citations