Publication:

Line edge and width roughness smoothing by plasma treatment

Date

2014
Journal article
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dc.contributor.authorDe Schepper, Peter
dc.contributor.authorHansen, Terje
dc.contributor.authorAltamirano Sanchez, Efrain
dc.contributor.authorVaglio Pret, Alessandro
dc.contributor.authorEl Otell, Ziad
dc.contributor.authorBoullart, Werner
dc.contributor.authorDe Gendt, Stefan
dc.contributor.imecauthorDe Schepper, Peter
dc.contributor.imecauthorAltamirano Sanchez, Efrain
dc.contributor.imecauthorVaglio Pret, Alessandro
dc.contributor.imecauthorEl Otell, Ziad
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-22T01:08:54Z
dc.date.available2021-10-22T01:08:54Z
dc.date.embargo9999-12-31
dc.date.issued2014
dc.identifier.issn1537-1646
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23721
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1674528
dc.source.beginpage23006
dc.source.issue2
dc.source.journalJournal of Micro/Nanolithography MEMS and MOEMS
dc.source.volume13
dc.title

Line edge and width roughness smoothing by plasma treatment

dc.typeJournal article
dspace.entity.typePublication
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