Method for in-situ etch uniformity monitoring using plasma emission interferometry

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Authors

Samara, Vladimir; de Marneffe, Jean-Francois; El Otell, Ziad; Economou, Demetre

ISSN

1071-1023

Issue

3

Journal

Journal of Vacuum Science and Technology B

Volume

33

Title

Method for in-situ etch uniformity monitoring using plasma emission interferometry

Publication type

Journal article

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