Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Articles
View item
imec Publications Repository
imec Publications
Articles
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Extraction and neutralization of positive and negative ions from a pulsed electronegative inductively coupled plasma
Metadata
Show full item record
Authors
Marinov, Daniil
;
El Otell, Ziad
;
Bowden, Mark
;
Braithwaite, Nicholas
ISSN
0963-0252
Issue
6
Journal
Plasma Sources Science and Technology
Volume
24
Title
Extraction and neutralization of positive and negative ions from a pulsed electronegative inductively coupled plasma
Publication type
Journal article
Collections
Articles
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login