Publication:
Extraction and neutralization of positive and negative ions from a pulsed electronegative inductively coupled plasma
Date
| dc.contributor.author | Marinov, Daniil | |
| dc.contributor.author | El Otell, Ziad | |
| dc.contributor.author | Bowden, Mark | |
| dc.contributor.author | Braithwaite, Nicholas | |
| dc.contributor.imecauthor | El Otell, Ziad | |
| dc.date.accessioned | 2021-10-22T20:55:42Z | |
| dc.date.available | 2021-10-22T20:55:42Z | |
| dc.date.issued | 2015 | |
| dc.identifier.issn | 0963-0252 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25618 | |
| dc.identifier.url | http://iopscience.iop.org/article/10.1088/0963-0252/24/6/065008 | |
| dc.source.beginpage | 65008 | |
| dc.source.issue | 6 | |
| dc.source.journal | Plasma Sources Science and Technology | |
| dc.source.volume | 24 | |
| dc.title | Extraction and neutralization of positive and negative ions from a pulsed electronegative inductively coupled plasma | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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